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Richard Rafloski Phones & Addresses

  • 6707 Leatherwood Ct, San Jose, CA 95120 (408) 323-4990
  • 3142 Melchester Dr, San Jose, CA 95132 (408) 926-9458
  • Travis AFB, CA

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Us Patents

Linear Conditioner Apparatus For A Chemical Mechanical Polishing System

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US Patent:
5938507, Aug 17, 1999
Filed:
Oct 27, 1995
Appl. No.:
8/549480
Inventors:
Richard V. Rafloski - San Jose CA
James C. Nystrom - Palo Alto CA
John Prince - Los Altos CA
Alfred A. Goldspiel - Watsonville CA
Stephen J. Blumenkranz - Redwood City CA
Manoocher Birang - Los Gatos CA
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
B24B 2118
US Classification:
451 56
Abstract:
A conditioner apparatus uses one or more linear conditioners. The linear conditioners extend from the edge of the polishing pad almost to the center of the pad. The conditioner apparatus may use two conditioner rods located on either side of a radial segment. The rods gimbal so that if one rod rises, the other rod is forced downwardly. In addition, the rods can pivot independently about a lateral axis, but they cannot pivot around the vertical axis. The linear conditioners may be actuated by a piezoelectric member or swept by an arm toward and away from the center of the polishing pad.
Richard J Rafloski from San Jose, CA, age ~90 Get Report