Richard V. Rafloski - San Jose CA
James C. Nystrom - Palo Alto CA
John Prince - Los Altos CA
Alfred A. Goldspiel - Watsonville CA
Stephen J. Blumenkranz - Redwood City CA
Manoocher Birang - Los Gatos CA
Applied Materials, Inc. - Santa Clara CA
A conditioner apparatus uses one or more linear conditioners. The linear conditioners extend from the edge of the polishing pad almost to the center of the pad. The conditioner apparatus may use two conditioner rods located on either side of a radial segment. The rods gimbal so that if one rod rises, the other rod is forced downwardly. In addition, the rods can pivot independently about a lateral axis, but they cannot pivot around the vertical axis. The linear conditioners may be actuated by a piezoelectric member or swept by an arm toward and away from the center of the polishing pad.